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標題 Metrology, inspection, and process control for microlithography X : 11-13 March, 1996, Santa Clara, California / sponsored and published by SPIE--the International Society for Optical Engineering ; Susan K. Jones, chair/editor.

出版資料 Bellingham, WA : SPIE, 1996.

複本

館藏地 索書號 狀態
 IU 3rd Floor  TK7874 .M4375 1996    AVAILABLE
說明 xiii, 2725 p : ill ; 28 cm.
系列 Proceedings / SPIE--the International Society of Optical Engineering ; v. 2725
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2725.
Notes "This volume contains the origianl papers presented at the tenth annual SPIE Conference on Metrology, Inspection, and Process Control for Microlithography"--Introd.
Bibliography Includes bibliographical references.
主題 Integrated circuits -- Inspection -- Congresses.
Integrated circuits -- Measurement -- Congresses.
Microlithography -- Congresses.
添加作者 Jones, Susan K.
Society of Photo-optical Instrumentation Engineers.
SPIE Conference on Metrology, Inspection, and Process Control for Microlithography (10th : 1996 : Santa Clara, Calif)
國際標準書號 0819421014 (pbk)
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