標題 Nondestructive evaluation and reliability of micro- and nanomaterial systems : 18-19 March 2002, Newport Beach, USA / Norbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

出版資料	Bellingham, Wash., USA : SPIE, c2002.

複本

館藏地	索書號	狀態
IU 3rd Floor	TA418.9.N35 N66 2002	AVAILABLE

說明	ix, 228 p : ill ; 28 cm.
系列	SPIE proceedings series ; v. 4703
	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4703.
Bibliography	Includes bibliographical references and index.
主題	Nanostructured materials -- Testing.
	Microelectromechanical systems -- Evaluation.
	Microelectromechanical systems -- Reliability.
	Non-destructive testing.
	Surfaces (Technology)
	Quality control.
添加作者	Meyendorf, Norbert.
	Baaklini, George Y.
	Michel, Bernd.
	Society of Photo-optical Instrumentation Engineers.
國際標準書號	0819444510