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標題 Handbook of thin film process technology / editors, David A. Glocker, S. Ismat Shah.

出版資料 Bristol, UK ; Philadelphia : Institute of Physics Pub, c1995.

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館藏地 索書號 狀態
 IU 3rd Floor  TA418.9.T45 H36 1995    AVAILABLE
說明 1 v. (various pagings) : ill ; 31 cm.
Notes Accompanied by : 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 18 p. (looseleaf in envelope) : ill. ; 30 cm.
Accompanied by : 98/2 Recipes for optical materials /editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) (looseleaf in envelope) : ill. ; 31 cm.
Bibliography Includes bibliographical references and indexes.
主題 Thin films.
Surfaces (Technology)
添加作者 Glocker, David A.
Shah, S. Ismat.
Westwood, William D, 1937-
添加標題 Reactive sputtering.
國際標準書號 0750303115