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SUBJECTS (1-2 之 2)
Masks Integrated Circuits Testing
1
PRINTED MAT
 

Automated photomask inspection


Novotny, Donald B.
Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1978. 1978

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2
PRINTED MAT
 

A production-compatible microelectronic test pattern for evaluating photomask misalignment


Russell, T. J. (Thomas James), 1943-
Washington : Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., 1979. 1979

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