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Titre Handbook of thin film process technology / editors, David A. Glocker, S. Ismat Shah.

Adresse Bibliographique Bristol, UK ; Philadelphia : Institute of Physics Pub, c1995.

Exemplaires

Localisation Cote Statut
 Innovative University Durant Collection  TA418.9.T45 H36 1995    AVAILABLE
Description 1 v. (various pagings) : ill ; 31 cm.
Notes Accompanied by : 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 18 p. (looseleaf in envelope) : ill. ; 30 cm.
Accompanied by : 98/2 Recipes for optical materials /editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) (looseleaf in envelope) : ill. ; 31 cm.
Bibliography Includes bibliographical references and indexes.
Sujet Thin films.
Surfaces (Technology)
Autre Auteur Glocker, David A.
Shah, S. Ismat.
Westwood, William D, 1937-
Autre Titre Reactive sputtering.
ISBN 0750303115