Ma bibliothèque

LEADER 00000nam  2200000 a 4500 
001    0750303115 
008    960319s1995    enka     be   001   eng   
010    95237129|z96119879 
020    0750303115 
040    UkNcU|cUkNcU|dViBlbV|dDLC 
050  4 TA418.9.T45|bH36 1995 
082 04 621.3815/2|220 
245 00 Handbook of thin film process technology /|ceditors, David
       A. Glocker, S. Ismat Shah. 
260    Bristol, UK ;|aPhiladelphia :|bInstitute of Physics Pub,
       |cc1995. 
300    1 v. (various pagings) :|bill ;|c31 cm. 
500    Accompanied by : 98/1 Reactive sputtering / guest editor, 
       William D. Westwood. 1998. 18 p. (looseleaf in envelope) :
       ill. ; 30 cm. 
500    Accompanied by : 98/2 Recipes for optical materials /
       editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. 
       (various pagings) (looseleaf in envelope) : ill. ; 31 cm. 
504    Includes bibliographical references and indexes. 
650  0 Thin films. 
650  0 Surfaces (Technology) 
700 1  Glocker, David A. 
700 1  Shah, S. Ismat. 
700 1  Westwood, William D,|d1937- 
740 0  Reactive sputtering.