Ma bibliothèque

LEADER 00000nam  2200000 a 4500 
001    0819444510 
008    031113s2002    waua          101   eng   
010    2002726813 
020    0819444510 
040    CUS|cCUS|dDLC 
050  4 TA418.9.N35|bN66 2002 
082 04 620/.5|222 
245 00 Nondestructive evaluation and reliability of micro- and 
       nanomaterial systems :|b18-19 March 2002, Newport Beach, 
       USA /|cNorbert Meyendorf, George Y. Baaklini, Bernd Michel,
       chairs/editors ; sponsored ... by SPIE--the International 
       Society for Optical Engineering. 
260    Bellingham, Wash., USA :|bSPIE,|cc2002. 
300    ix, 228 p :|bill ;|c28 cm. 
490 0  SPIE proceedings series ;|vv. 4703 
504    Includes bibliographical references and index. 
650  0 Nanostructured materials|xTesting. 
650  0 Microelectromechanical systems|xEvaluation. 
650  0 Microelectromechanical systems|xReliability. 
650  0 Non-destructive testing. 
650  0 Surfaces (Technology) 
650  0 Quality control. 
700 1  Meyendorf, Norbert. 
700 1  Baaklini, George Y. 
700 1  Michel, Bernd. 
710 2  Society of Photo-optical Instrumentation Engineers. 
830  0 Proceedings of SPIE--the International Society for Optical
       Engineering ;|vv. 4703.